Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Suter, Dieter | - |
dc.contributor.author | Eshlaghi, Soheyla | - |
dc.contributor.author | Meier, Cedrik | - |
dc.contributor.author | Reuter, D. | - |
dc.contributor.author | Wieck, A. D. | - |
dc.date.accessioned | 2008-02-12T15:23:41Z | - |
dc.date.available | 2008-02-12T15:23:41Z | - |
dc.date.issued | 1999-12-01 | - |
dc.identifier.citation | Soheyla Eshlaghi, Cedrik Meier, Dieter Suter, D. Reuter, and A.D. Wieck: Depth profile of the implantation-enhanced intermixing of Ga+ focused ion beam in AlAs/GaAs quantum wells. In: J. Appl. Phys. 86, 6605-6607 (1999). | en |
dc.identifier.uri | http://hdl.handle.net/2003/25023 | - |
dc.identifier.uri | http://dx.doi.org/10.17877/DE290R-3474 | - |
dc.description.abstract | The implantation-induced intermixing depth profile for 100 keV Ga + ions was determined by photoluminescence measurements on a series of samples containing quantum wells at variable depth from the surface but identical thickness. They were uniformly implanted and subsequently a rapid thermal annealing was applied. The measured maximum of the intermixing occurred at a depth of about 70 nm, significantly deeper than theoretical predictions. These results are important for achieving sufficient intermixing with a low implantation dose, thereby optimizing crystal quality and lateral resolution. | en |
dc.language.iso | en | de |
dc.publisher | American Institute of Physics | en |
dc.rights | ©1999 American Institute of Physics | en |
dc.subject.ddc | 530 | - |
dc.title | Depth profile of the implantation-enhanced intermixing of Ga + focused ion beam in AlAs/GaAs quantum wells | en |
dc.type | Text | de |
dc.identifier.doi | 10.1063/1.371720 | - |
dc.type.publicationtype | article | en |
dc.identifier.url | http://link.aip.org/link/?JAPIAU/86/6605/1 | - |
eldorado.identifier.url | http://e3.physik.tu-dortmund.de/~suter/eprints/Depth_profile_of_Implantati.pdf | - |
dcterms.accessRights | restricted | - |
Appears in Collections: | Suter, Dieter Prof. Dr. |
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