Ätzen und Abscheiden von Silicium

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DC Field	Value	Language
dc.contributor.advisor	Jurkschat, Klaus	-
dc.contributor.author	Hadjizadeh Ziabari, Seyed Mahdi	-
dc.date.accessioned	2010-08-09T12:03:40Z	-
dc.date.available	2010-08-09T12:03:40Z	-
dc.date.issued	2010-08-09	-
dc.identifier.uri	http://hdl.handle.net/2003/27343	-
dc.identifier.uri	http://dx.doi.org/10.17877/DE290R-15623	-
dc.language.iso	de	de
dc.subject	Cyclopentasilan	de
dc.subject	Ätzen von Silicium	de
dc.subject	Chlortrifluorid	de
dc.subject.ddc	540	-
dc.title	Ätzen und Abscheiden von Silicium	de
dc.title.alternative	Grundlagen und Anwendungen	de
dc.type	Text	de
dc.contributor.referee	Kornath, Andreas	-
dc.date.accepted	2010-06-02	-
dc.type.publicationtype	doctoralThesis	de
dc.identifier.urn	urn:nbn:de:hbz:290-2003/27343-1	-
dcterms.accessRights	open access	-
Appears in Collections:	Lehrstühle für Anorganische Chemie

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