De Bruin, DennisPoelsema, BeneVan Dijken, Sebastiaan2004-12-142004-12-1420012001http://hdl.handle.net/2003/1908010.17877/DE290R-1781enThe American Physical SocietyPhysical Review Letters530Kinetic Physical Etching for Versatile Novel Design of Well Ordered Self-Affine Nanogrooves10.1103/PhysRevLett.86.4608article (journal)