Experiments and simulations on the structural and electrical properties of nano- and microstructures on graphite surfaces produced by ion beam lithography

Patryarcha, Lukas2011-09-282011-09-282011-09-28http://hdl.handle.net/2003/2911810.17877/DE290R-2912enFIBFocused ion beamGraphiteHOPGIon beam lithographyMicrostructuresNanostructuresSRIMTRIM530Experiments and simulations on the structural and electrical properties of nano- and microstructures on graphite surfaces produced by ion beam lithographydoctoral thesis