Optical Anisotropy of Oxidized Si(001) Surfaces and Its Oscillation in the Layer-By-Layer Oxidation Process

Miyata, N.Nishizawa, M.Shklyaev, A.Yamasaki, S.Yasuda, T.2004-12-032004-12-0320012001http://hdl.handle.net/2003/57010.17877/DE290R-6431enThe American Physical SocietyPhysical Review Letters530Optical Anisotropy of Oxidized Si(001) Surfaces and Its Oscillation in the Layer-By-Layer Oxidation Process10.1103/PhysRevLett.87.037403article (journal)