Neyer, A.Cai, Dengke2008-04-242008-04-242008-04-24http://hdl.handle.net/2003/25231http://dx.doi.org/10.17877/DE290R-8242enPolysiloxaneEOCBWaveguideMicrosystem fabrication and productionPackagingQuality and Reliability620Optical and mechanical aspects on polysiloxane based electrical-optical-circuits-boardTexturn:nbn:de:hbz:290-2003/25231-1