State-Specific Enhancement of Cl+ and Cl Desorption for SiCl4 Adsorbed on a Si(100) Surface Following Cl 2p and Si 2p Core-Level Excitations

Chen, J. M.Lu, K. T.2004-12-272004-12-2720012001http://hdl.handle.net/2003/1936310.17877/DE290R-2102enThe American Physical SocietyPhysical Review Letters530State-Specific Enhancement of Cl+ and Cl Desorption for SiCl4 Adsorbed on a Si(100) Surface Following Cl 2p and Si 2p Core-Level Excitations10.1103/PhysRevLett.86.3176article (journal)