Chen, Francis F.Evans, John D.2004-12-142004-12-1420012001http://hdl.handle.net/2003/1881110.17877/DE290R-12632enThe American Physical SocietyPhysical Review Letters530Nonlocal Power Deposition in Inductively Coupled Plasmas10.1103/PhysRevLett.86.5502article (journal)