Agarwal, Girish S.Bentley, Sean J.Boyd, Robert W.Nagasako, Elna M.2004-12-102004-12-1020012001http://hdl.handle.net/2003/1837910.17877/DE290R-12539enThe American Physical SocietyPhysical Review Letters530Comment on "Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit"10.1103/PhysRevLett.86.1389article (journal)