Authors: Chen, Francis F.
Evans, John D.
Title: Nonlocal Power Deposition in Inductively Coupled Plasmas
Language (ISO): en
URI: http://hdl.handle.net/2003/18811
http://dx.doi.org/10.17877/DE290R-12632
Issue Date: 2001
Publisher: The American Physical Society
Appears in Collections:Issue 24

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