Characterization of protective AlCrON thin films for application on sensor thin films in fused layer modeling processes

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dc.contributor.authorTillmann, Wolfgang
dc.contributor.authorUrbanczyk, Julia
dc.contributor.authorSonnhof, Maximilian
dc.contributor.authorKünne, Bernd
dc.contributor.authorMainz, Michael
dc.contributor.authorBengfort, Philipp
dc.contributor.authorRademacher, Hans-Georg
dc.contributor.authorLopes Dias, Nelson Filipe
dc.date.accessioned2025-12-10T11:48:33Z
dc.date.available2025-12-10T11:48:33Z
dc.date.issued2024-12-09
dc.description.abstractIn plastic processing, the use of sensor thin films is gaining interest for inline measurement to ensure stable process control. However, due to the corrosive and abrasive characteristics of molten plastics, the application of an appropriate protective coating becomes imperative to ensure the functionality of the sensor films. AlCrON thin films demonstrate favorable protective attributes for this purpose. The tribo-mechanical and electrical properties are inherently influenced by the oxygen content. Therefore, a systematic variation of O2 gas flow rates (10 to 30 sccm in steps of five) during the mid-frequency magnetron sputtering process was employed resulting in the O contents rise from 12.2 at.-% for 10 mln O2 to 57.6 at.-% for 30 mln O2. Simultaneously, a change of a polycrystalline structure containing CrN, Cr2N, and hexagonal AlN to an amorphous structure with increasing O content for AlCrON is observed. This affects the tribo-mechanical properties. The highest polycrystallinity was reached at 25.2 at.-% O resulting in a H/E maximum, with a maximum in hardness of (37.6 ± 2.8) GPa and an elastic modulus of (361.2 ± 20.7) GPa. Here, also the lowest coefficient of friction (CoF) at elevated temperatures was reached with 0.43 against polypropylene (PP) and 0.23 against polyamide (PA). The low CoF correlates with a lower wetting ability of the AlCrON thin film. Regarding the electrical properties AlCrON thin films show insulating characteristics dependent on the O content. The electrical resistance increases with higher O content due to a change into a more ionic structure. The results show that AlCrON thin films offer promising protective qualities for sensor applications in plastic processing. By adjusting the oxygen content, their tribo-mechanical properties can be optimized for reduced friction and enhanced durability, while their insulating properties are promising for maintaining the functionality of the sensors.en
dc.identifier.urihttp://hdl.handle.net/2003/44480
dc.language.isoen
dc.relation.ispartofseriesSurface & coatings technology; 496
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subjectAlCrON
dc.subjectPlastic processingen
dc.subjectTribologyen
dc.subjectConductivityen
dc.subjectSensor thin filmsen
dc.subject.ddc620
dc.subject.ddc670
dc.subject.rswkChrom
dc.subject.rswkAluminiumoxide
dc.subject.rswkKunststoffverarbeitung
dc.subject.rswkTribologie
dc.subject.rswkElektrische Leitfähigkeit
dc.subject.rswkSensor
dc.subject.rswkDünne Schicht
dc.titleCharacterization of protective AlCrON thin films for application on sensor thin films in fused layer modeling processesen
dc.typeText
dc.type.publicationtypeArticle
dcterms.accessRightsopen access
eldorado.dnb.deposittrue
eldorado.doi.registerfalse
eldorado.secondarypublicationtrue
eldorado.secondarypublication.primarycitationWolfgang Tillmann, Julia Urbanczyk, Maximilian Sonnhof, Bernd Künne, Michael Mainz, Philipp Bengfort, Hans-Georg Rademacher, Nelson Filipe Lopes Dias, Characterization of protective AlCrON thin films for application on sensor thin films in fused layer modeling processes, Surface and Coatings Technology, Volume 496, 2025, 131649, https://doi.org/10.1016/j.surfcoat.2024.131649
eldorado.secondarypublication.primaryidentifierhttps://doi.org/10.1016/j.surfcoat.2024.131649

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