Experiments and  simulations on the structural and  electrical properties of nano- and microstructures on  graphite surfaces produced by ion beam lithography

dc.contributor.advisor	Hövel, Heinz
dc.contributor.author	Patryarcha, Lukas
dc.contributor.referee	Weis, Thomas
dc.date.accepted	2011-09-13
dc.date.accessioned	2011-09-28T06:17:56Z
dc.date.available	2011-09-28T06:17:56Z
dc.date.issued	2011-09-28
dc.identifier.uri	http://hdl.handle.net/2003/29118
dc.identifier.uri	http://dx.doi.org/10.17877/DE290R-2912
dc.language.iso	en	de
dc.subject	FIB	en
dc.subject	Focused ion beam	en
dc.subject	Graphite	en
dc.subject	HOPG	en
dc.subject	Ion beam lithography	en
dc.subject	Microstructures	en
dc.subject	Nanostructures	en
dc.subject	SRIM	en
dc.subject	TRIM	de
dc.subject.ddc	530
dc.title	Experiments and simulations on the structural and electrical properties of nano- and microstructures on graphite surfaces produced by ion beam lithography	en
dc.type	Text	de
dc.type.publicationtype	doctoralThesis	de
dcterms.accessRights	open access
eldorado.dnb.deposit	true	de

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