Experiments and simulations on the structural and electrical properties of nano- and microstructures on graphite surfaces produced by ion beam lithography

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dc.contributor.advisorHövel, Heinz
dc.contributor.authorPatryarcha, Lukas
dc.contributor.refereeWeis, Thomas
dc.date.accepted2011-09-13
dc.date.accessioned2011-09-28T06:17:56Z
dc.date.available2011-09-28T06:17:56Z
dc.date.issued2011-09-28
dc.identifier.urihttp://hdl.handle.net/2003/29118
dc.identifier.urihttp://dx.doi.org/10.17877/DE290R-2912
dc.language.isoende
dc.subjectFIBen
dc.subjectFocused ion beamen
dc.subjectGraphiteen
dc.subjectHOPGen
dc.subjectIon beam lithographyen
dc.subjectMicrostructuresen
dc.subjectNanostructuresen
dc.subjectSRIMen
dc.subjectTRIMde
dc.subject.ddc530
dc.titleExperiments and simulations on the structural and electrical properties of nano- and microstructures on graphite surfaces produced by ion beam lithographyen
dc.typeTextde
dc.type.publicationtypedoctoralThesisde
dcterms.accessRightsopen access

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