Ätzen und Abscheiden von Silicium

dc.contributor.advisor	Jurkschat, Klaus
dc.contributor.author	Hadjizadeh Ziabari, Seyed Mahdi
dc.contributor.referee	Kornath, Andreas
dc.date.accepted	2010-06-02
dc.date.accessioned	2010-08-09T12:03:40Z
dc.date.available	2010-08-09T12:03:40Z
dc.date.issued	2010-08-09
dc.identifier.uri	http://hdl.handle.net/2003/27343
dc.identifier.uri	http://dx.doi.org/10.17877/DE290R-15623
dc.identifier.urn	urn:nbn:de:hbz:290-2003/27343-1
dc.language.iso	de	de
dc.subject	Cyclopentasilan	de
dc.subject	Ätzen von Silicium	de
dc.subject	Chlortrifluorid	de
dc.subject.ddc	540
dc.title	Ätzen und Abscheiden von Silicium	de
dc.title.alternative	Grundlagen und Anwendungen	de
dc.type	Text	de
dc.type.publicationtype	doctoralThesis	de
dcterms.accessRights	open access

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