Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Westphal, Carsten | - |
dc.contributor.author | Flüchter, Christian Rolf | - |
dc.date.accessioned | 2008-08-25T13:46:15Z | - |
dc.date.available | 2008-08-25T13:46:15Z | - |
dc.date.issued | 2008-08-25T13:46:15Z | - |
dc.identifier.uri | http://hdl.handle.net/2003/25779 | - |
dc.identifier.uri | http://dx.doi.org/10.17877/DE290R-958 | - |
dc.language.iso | en | de |
dc.subject | Silizium | de |
dc.subject | Hafnium | de |
dc.subject | Photoelektronenspektroskopie | de |
dc.subject | AFM | de |
dc.subject | high-k | de |
dc.subject | Photoelektronenbeugung | de |
dc.subject.ddc | 530 | - |
dc.title | Structural analysis of HfO 2 and HfSi 2 ultra-thin films on Si(100) | en |
dc.title.alternative | a photoelectron diffraction study | en |
dc.type | Text | de |
dc.contributor.referee | Spoon, B. | - |
dc.date.accepted | 2008-08-12 | - |
dc.type.publicationtype | doctoralThesis | de |
dc.identifier.urn | urn:nbn:de:hbz:290-2003/25779-3 | - |
dcterms.accessRights | open access | - |
Appears in Collections: | Experimentelle Physik I |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Dissertation.pdf | DNB | 16.8 MB | Adobe PDF | View/Open |
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