Autor(en): | Bruchhaus, Lars |
Titel: | an ion beam complement to electron beam writers |
Sonstige Titel: | a part of the development, characterisation and utilisation |
Sprache (ISO): | en |
Zusammenfassung: | With the technology expertise from complementary fields, we have managed to develop a new liquid metal ion source (LMIS) focused ion beam (FIB) instrument dedicated to nano patterning. It possesses an acceleration voltage regime up to 40 kV. The instrument is a commensurate alternative nano patterning tool which has enabled us to explore a large amount of successful application fields. In our experiments we have exploited also additional ion-matter interactions to the two current main stream ones (sputtering and gas assisted processing). For example employing 40 keV Ga ions, we have analysed two applications in more detail: We exposed a 6 nm thin hydrogen silsesquioxane (HSQ) resist and reached a line-width thinner than 10 nm as well as a minimum period of 30 nm. In addition we exploited the instrument patterning strategies flexibility to analyse a long known minimum line-width limiting effect in LMIS resist exposure. Thin films of Au55 clusters were exposed as a potential candidate for process complexity reduction in nano fabrication of conducting features. Further promising results are summarised proving the instrument stability and applicability. |
Schlagwörter: | Au55 charged particle optics FIB focused ion beam gold cluster HSQ IBL ion beam lithography ion matter interactions liquid metal ion source LMIS nano patterning nanostructures nanostructuring |
Schlagwörter (RSWK): | Ionenstrahllithographie Nanolithographie |
URI: | http://hdl.handle.net/2003/29512 http://dx.doi.org/10.17877/DE290R-14294 |
Erscheinungsdatum: | 2012-07-16 |
Enthalten in den Sammlungen: | Experimentelle Physik I |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
---|---|---|---|---|
Dissertation.pdf | DNB | 3.79 MB | Adobe PDF | Öffnen/Anzeigen |
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