Authors: Hadjizadeh Ziabari, Seyed Mahdi
Title: Ätzen und Abscheiden von Silicium
Other Titles: Grundlagen und Anwendungen
Language (ISO): de
Subject Headings: Cyclopentasilan
Ätzen von Silicium
Chlortrifluorid
URI: http://hdl.handle.net/2003/27343
http://dx.doi.org/10.17877/DE290R-15623
Issue Date: 2010-08-09
Appears in Collections:Lehrstühle für Anorganische Chemie

Files in This Item:
File Description SizeFormat 
Dissertation.pdfDNB1.45 MBAdobe PDFView/Open


This item is protected by original copyright



All resources in the repository are protected by copyright.