Authors: | Hadjizadeh Ziabari, Seyed Mahdi |
Title: | Ätzen und Abscheiden von Silicium |
Other Titles: | Grundlagen und Anwendungen |
Language (ISO): | de |
Subject Headings: | Cyclopentasilan Ätzen von Silicium Chlortrifluorid |
URI: | http://hdl.handle.net/2003/27343 http://dx.doi.org/10.17877/DE290R-15623 |
Issue Date: | 2010-08-09 |
Appears in Collections: | Lehrstühle für Anorganische Chemie |
Files in This Item:
File | Description | Size | Format | |
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Dissertation.pdf | DNB | 1.45 MB | Adobe PDF | View/Open |
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