Temperaturverhalten und Strukturbestimmung dünner Metalloxidschichten auf Siliziumoberflächen

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DC Field	Value	Language
dc.contributor.advisor	Westphal, Carsten	-
dc.contributor.author	Schönbohm, Frank	-
dc.date.accessioned	2014-01-07T07:11:35Z	-
dc.date.available	2014-01-07T07:11:35Z	-
dc.date.issued	2014-01-07	-
dc.identifier.uri	http://hdl.handle.net/2003/31800	-
dc.identifier.uri	http://dx.doi.org/10.17877/DE290R-13293	-
dc.language.iso	de	de
dc.subject	Photoelektronenspektroskopie	de
dc.subject	Photoelektronenbeugung	de
dc.subject	Silizium	de
dc.subject	Hafniumdioxid	de
dc.subject	Zirkoniumdioxid	de
dc.subject.ddc	530	-
dc.title	Temperaturverhalten und Strukturbestimmung dünner Metalloxidschichten auf Siliziumoberflächen	de
dc.type	Text	de
dc.contributor.referee	Rhode, Wolfgang	-
dc.date.accepted	2013-12-12	-
dc.type.publicationtype	doctoralThesis	de
dcterms.accessRights	open access	-
Appears in Collections:	Experimentelle Physik I

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