Authors: | Schönbohm, Frank |
Title: | Temperaturverhalten und Strukturbestimmung dünner Metalloxidschichten auf Siliziumoberflächen |
Language (ISO): | de |
Subject Headings: | Photoelektronenspektroskopie Photoelektronenbeugung Silizium Hafniumdioxid Zirkoniumdioxid |
URI: | http://hdl.handle.net/2003/31800 http://dx.doi.org/10.17877/DE290R-13293 |
Issue Date: | 2014-01-07 |
Appears in Collections: | Experimentelle Physik I |
Files in This Item:
File | Description | Size | Format | |
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Dissertation.pdf | DNB | 50.47 MB | Adobe PDF | View/Open |
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