Authors: Schönbohm, Frank
Title: Temperaturverhalten und Strukturbestimmung dünner Metalloxidschichten auf Siliziumoberflächen
Language (ISO): de
Subject Headings: Photoelektronenspektroskopie
Photoelektronenbeugung
Silizium
Hafniumdioxid
Zirkoniumdioxid
URI: http://hdl.handle.net/2003/31800
http://dx.doi.org/10.17877/DE290R-13293
Issue Date: 2014-01-07
Appears in Collections:Experimentelle Physik I

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